DC Magnetron Sputtering System

DC Magnetron Sputtering System

• Reactor: Stainless Steel 304L SS or 316 SS.

• Magnetron Sputtering Cathode: Cathode has perfect design. Maximum power can be applied without much reflected power loss with perfect gas shower design.

• Substrate :Heating arrangement maximum up to 400°C with substrate rotation facility

• Gas Manifold: Made from SS tubes 316, Pneumatic ON/OFF valves, Particle filters & Mass flow controllers.

• Pumping Line: High vacuum line, Pneumatic ON/OFF valves. Auto throttle valve with pressure controlled system ,

• Vacuum System: Vacuum better than 10^-5Torr. based Diffusion pump back by Rotary Vacuum pump, Penning Pirani vacuum gauges