Microwave Plasma Cleaning System

MICROWAVE PLASMA CLENAR

Microwave Plasma Cleaning System: is suitable for plasma cleaning small substrate, etching and preparation of hydrophilic substrate.

Applications:

• Plasma cleaning SEM, TEM, and SPM parts

• Surface cleaning of samples.

• Plasma etching of organic samples for SEM and TEM

• Removal of photo resist and epi-layers by plasma etching

• Oxygen plasma for the improvement of tin oxide conducting coating