Mw Pecvd System
Price And Quantity
- 100000 - 9500000 INR
MW PECVD SYSTEM WITH RF BIASED & HEATING
- Microwave plasma enhanced chemical vapor deposition system
- UHV SS chamber complete, turbo pump based vacuum pumping, throttle valve and pirani and penning vacuum gauges etc.
- Four line gas manifold with Mass Flow Controllers.
- 1.2 Kilowatt microwave power generator, three stub tuner, E-bend , mode transfer from rectangular to circular with quartz plate MW power transfer in to vacuum chamber
- Substrate RF biased with heating arrangement
- The system is suitable to deposit polymer to diamond including diamond like carbon, Nano-diamond aligned carbon nanotubes & various other semiconductor thin films.
- 4 Per Month
- 1-16 Week
309, Vardhman Sudarshan Plaza, Plot No. 4, MLU, Sector-5, Dwarka, New Delhi, Delhi, 110075, India