MWPECVD System

MW PECVD system For Diamond with the following Specifications:

• Frequency 2.45 GHz and Power rating 1.5 KW , three stub tuner for power matching , forward and reflected power measurement , rectangular to circular mode converter with sliding tuner .
• UHV reactor complete with vacuum pumping , throttle valve with high pressure vacuum gauge , Gas manifold with MFC and having methane , hydrogen , oxygen and argon gases etc.